Eddy current measuring system for monitoring and controlling a chemical vapor deposition (CVD) process

ABSTRACT

A method for estimating a thickness profile of a substrate sample that has undergone a chemical vapor deposition (CVD) process includes obtaining initial eddy current measurement values while an eddy current probe is positioned at an initial distance relative to the substrate sample. Terminating values are obtained while the eddy current probe is positioned at a modified distance relative to the sample. An intersecting line can be calculated using the initial and terminating resistance and reactance measurements. An intersecting point between a previously defined natural intercepting curve and the intersecting line may also be determined. A reactance voltage of the intersecting point may be located along a digital calibration curve to identify a closest-two of a plurality of calibration samples. The conductive top layer thickness of the substrate sample can then be determined by approximating a location, using linear or non-linear calculations, of the reactance voltage relative to the closest-two of the plurality of calibration samples.

CROSS REFERENCE TO RELATED APPLICATIONS

[0001] This application is a continuation-in-part of U.S. applicationSer. No. 09/835,975 filed Apr. 17, 2001, which is a continuation-in-partof U.S. application Ser. No. 09/545,119 filed Apr. 7, 2000, now U.S.Pat. No. 6,407,546.

BACKGROUND OF THE INVENTION

[0002] 1. Field of the Invention

[0003] The present invention relates generally to an eddy currentmeasuring system, and in particular to an eddy current measuring systemfor estimating the thickness of conductive films formed on semiconductorwafer products.

[0004] 2. Description of the Related Art

[0005] In the semiconductor industry, critical steps in the productionof semiconductor wafers are the selective formation and removal of filmson an underlying substrate. The films are made from a variety ofsubstances, and can be conductive (for example, metal or a magneticferrous conductive material) or non-conductive (for example, aninsulator or a magnetic ferrite insulating material).

[0006] Films are used in typical semiconductor processing by: (1)depositing a film; (2) patterning areas of the film using lithographyand etching; (3) depositing material which fills the etched areas; and(4) planarizing the structure by etching or chemical-mechanicalpolishing (CMP). Films may be formed on a substrate by a variety ofwell-known methods including physical vapor deposition (PVD) bysputtering or evaporation, chemical vapor deposition (CVD), plasmaenhanced chemical vapor deposition (PECVD), and electro-chemical process(ECP). Films may be removed by any of several well-known methodsincluding chemical-mechanical polishing (CMP), reactive ion etching(RIE), wet etching, electrochemical etching, vapor etching, and sprayetching.

[0007] The semiconductor fabrication industry continues to demand higheryields and shorter fabrication times, while insisting uponever-increasing quality standards. A variety of inspection procedureshave been employed during the various stages of the semiconductor waferfabrication process in an attempt to meet these demands. Theseinspection procedures include destructive, as well as nondestructive,testing methods for analyzing wafer products.

[0008] In a destructive measuring process, a standard or electronmicroscope may be used to measure the thickness of a wafer's coatingafter a cross-section has been obtained. When the thickness of athin-film coating is greater than 10,000 Å, for example, this type ofdestructive measuring method may provide accurate measurements. However,measuring accuracy usually begins to degrade as the coating thicknessfalls below the 10,000 Å threshold.

[0009] Other types of measuring processes utilize sensitive eddy currentsensors which do not destroy or significantly alter the articlemeasured. Although eddy current sensors provide highly accuratereadings, these sensors are susceptible to error. For example, theshifting of an electronic reference point due to thermal drifting oftenoccurs at some point during the data collection and inspection process.To compensate for thermal drifting and to ensure accurate readings, manyexisting eddy current sensors must be recalibrated on a periodic basis.

[0010] While there have been other attempts in addition to eddy currentsensors to employ highly accurate, nondestructive measuring devices forestimating the thickness of a conductive top layer formed on asemiconductor wafer product, improvement is still needed.

SUMMARY OF THE INVENTION

[0011] A method for estimating a thickness profile of a substrate samplethat has undergone a chemical vapor deposition (CVD) process includesobtaining initial eddy current measurement values while an eddy currentprobe is positioned at an initial distance relative to the substratesample. Terminating values are obtained while the eddy current probe ispositioned at a modified distance relative to the sample. Anintersecting line can be calculated using the initial and terminatingresistance and reactance measurements. An intersecting point between apreviously defined natural intercepting curve and the intersecting linemay also be determined. A reactance voltage of the intersecting pointmay be located along a digital calibration curve to identify aclosest-two of a plurality of calibration samples. The conductive toplayer thickness of the substrate sample can then be determined byapproximating a location, using linear or non-linear calculations, ofthe reactance voltage relative to the closest-two of the plurality ofcalibration samples.

BRIEF DESCRIPTION OF THE DRAWING

[0012] The above and other aspects, features and advantages of thepresent invention will become more apparent upon consideration of thefollowing description of preferred embodiments taken in conjunction withthe accompanying drawing, wherein:

[0013]FIG. 1 is a diagram showing an eddy current measuring system inaccordance with the invention;

[0014]FIG. 2 is a graph showing two-point lift-off curves relating toeddy current measurements taken from calibration and substrate sampleshaving, respectively, conductive top layers of known and unknownthicknesses;

[0015]FIG. 3 is a graph showing the formation of a natural interceptingcurve defined by initial resistance and reactance values for calibrationsample curves A through E;

[0016]FIG. 4 is a graph showing a digital calibration curve that may begenerated by data associated with calibration samples A through E;

[0017]FIG. 5 is a flowchart showing exemplary operations for one of avariety of different methods for estimating the thickness of aconductive top layer of a substrate;

[0018]FIG. 6 is a diagram showing an eddy current measuring system inaccordance with an alternative embodiment of the invention;

[0019]FIG. 7 is a side view showing several components of an eddycurrent measuring system in accordance with the invention;

[0020]FIG. 8 provides a bottom view of the eddy current probe support ofFIG. 7;

[0021]FIG. 9 is a top view of the eddy current probe support of FIG. 7positioned over a substrate;

[0022]FIG. 10 is a three-dimensional contour map representing athickness profile that may be obtained from a substrate in accordancewith the invention;

[0023]FIG. 11 is a graph representing a possible thickness profile thatmay be created by obtaining a plurality of thickness measurements over adiameter of a substrate;

[0024]FIG. 12 is a block diagram showing an example of an integratededdy current measuring system configured with CVD and CMP systems;

[0025]FIG. 13 is a block diagram showing another example of anintegrated eddy current measuring system of the invention configuredwith multiple metal deposition systems;

[0026]FIG. 14 is a block diagram showing an example of an integratededdy current measuring system configured with a single metal depositionsystem; and

[0027]FIG. 15 is a block diagram showing an example of a standaloneimplementation of an eddy current measuring system.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0028] In the following description of preferred embodiments, referenceis made to the accompanying drawings, which form a part hereof, andwhich show by way of illustration, specific embodiments of theinvention. It is to be understood by those of ordinary skill in thistechnological field that other embodiments may be utilized, andstructural, electrical, as well as procedural changes may be madewithout departing from the scope of the present invention.

[0029]FIG. 1 is a diagram showing a single-probe eddy current measuringsystem 10 in accordance with some embodiments of the present invention.As shown, the system includes a conventionally configured eddy currentprobe 12 having sense coil 14, reference coil 16, and capacitance sensor18. The eddy current probe is shown in communication with controller 20,which, during operation, may provide relative motion between the eddycurrent probe and substrate 22. In a typical implementation, thecontroller translates the eddy current probe and included componentsalong vertical axis Z, which is normal to the substrate.

[0030] The eddy current probe circuit may be implemented in any suitablemanner. In one particular example, eddy current probe 12 may beconstructed using similarly configured sense and reference coils 14, 16.If desired, the sense and reference coils may each be constructed usingferrite cores, equal coil turns, and similarly sized magnetic cable (forexample, 40 gauge). The circuit may further include AC voltage source 28for inducing an AC voltage to the sense and reference coils, andWheatstone bridge 30. Suitable probes for implementing eddy currentprobe 12 include, for example, absolute pencil probes, model numbersSBS-30 or SB-30, developed by Andrew NDT Engineering, Inc., Morgan Hill,Calif.

[0031] In many implementations, AC voltage source 28 may providepre-selected sinusoidal waves at a suitable frequency (for example, 1MHz to 100 MHz, or higher) to the Wheatstone bridge. A sinusoidal waveis often utilized to maximize phase separation between samples ofdiffering thicknesses, but such a wave pattern is not a requiredfeature.

[0032] Sense and reference coils 14 and 16 may be fabricated so thattheir respective inductance values are equal at a given frequency, whilethe resistance of each coil is less than about 20 Ohms, for example.

[0033] In operation, analog signals generated by eddy current probe 12may be fed into an analog to digital (A/D) board 34 which converts theanalog signals into digital signals processed by CPU 36 in accordancewith the invention.

[0034] CPU 36 may be configured with a suitable memory unit 38 forstoring a variety of different data including, for example, data tablescontaining calibration sample data, programmed computer statements whichenable a computer system to act in accordance with the invention, andother similar types of data. The memory unit can be any type (orcombination) of suitable volatile and non-volatile memory or storagedevices including random access memory (RAM), static random accessmemory (SRAM), electrically erasable programmable read-only memory(EEPROM), erasable programmable read-only memory (EPROM), programmableread-only memory (PROM), read-only memory (ROM), magnetic memory, flashmemory, magnetic or optical disk, or other similar memory or datastorage types. If desired, the system may be configured with display 40.

[0035] It is often useful to know or ascertain the relative spatialrelationship between sense coil 14 and a top surface of substrate 22during various stages of operation. To accomplish such-measurements, anyof a variety of suitable proximity sensors may be implemented. Asdepicted in FIG. 1, a proximity sensor may be configured as capacitancesensor 18. In this implementation, the capacitance sensor may beconfigured to produce a predetermined voltage in the presence ofinterference or interruption in charge path. In operation, as thecapacitance sensor approaches contact with the substrate, the charge mayexperience interference and produce a voltage drop. A specific ordesired distance may be obtained or maintained by identifying aparticular voltage output generated by the capacitance sensor.

[0036] Although the capacitance sensor may be implemented in someembodiments, the invention is not so limited and any of a variety ofconventional proximity sensors may be used including, for example,optical lasers, Hall effect sensors, thermal IR sensors, ultrasound, andthe like. Furthermore, it is not required that an implemented proximitysensor be configured within eddy current probe 12 and that otherconfigurations are possible. For example, a proximity sensor may beconfigured on the outside of the eddy current probe or on some adjacentstructure such as a probe support, as will be described in more detailin the following figures. Accordingly, the proximity sensor may beconfigured in almost any location as long as the relative distancebetween the sense coil and the substrate surface can be ascertained ormaintained.

[0037] Distance 42 represents the relative distance between sense coil14 and the surface of substrate 22 where a desired magnitude of eddycurrent signals may be obtained during an initial measuring process. Aparticular implementation may be where distance 42 is about 75 microns,which may be indicated by an output of 5 volts, for example, fromcapacitance sensor 18.

[0038] An eddy current measuring system may be implemented in a varietyof applications where thickness measurements of conductive layers isrequired or desired. Typical applications include, for example,semiconductor fabrication, aerospace industries, metallurgic researchand develop environments, jewelry manufacturing, and the like. As amatter of convenience, various embodiments of an eddy current measuringsystem for performing thickness measurements will be described in thecontext of a typical semiconductor fabrication environment. However, itis to be understood that the invention is not so limited and that manyother applications are envisioned and possible within the teachings ofthis invention.

[0039] In a generalized example, substrate 22 may be formed as asemiconductor wafer having a conductive top layer 26. For example, thesubstrate may be a doped or an undoped silicon substrate or a substrateupon which one or more layers of conducting and/or non-conductingunderlying films have already been formed and patterned into gates,wires or interconnects in a multi-level structure. The conductive toplayer may be formed using any of a variety of different depositionprocesses such as electro-chemical process (ECP), chemical vapordeposition (CVD), physical vapor deposition (PVD), plasma enhanced CVD(PECVD), low pressure CVD (LPCVD), rapid thermal CVD (RTCVD),atmospheric pressure CVD (APCVD), and the like.

[0040] The term “calibration sample” will be used herein to denote aspecific type of substrate, and in particular, a substrate having aconductive top layer of known thickness. The term “substrate sample” isused herein to refer to a substrate having a conductive top layer ofunknown thickness formed using known semiconductor fabricationprocesses.

[0041] In accordance with many embodiments of the invention, the eddycurrent measuring system shown in FIG. 1 may be used to measure thethickness and sheet resistance of a conductive top layer disposed onsemiconductor wafer products. To accomplish such measurements, it istypically necessary to first measure calibration samples havingconductive top layers of known thicknesses using a calibration process.Typically, an assortment of calibration samples having metal layers ofvarying thickness are used during a calibration process. By way ofexample, calibration samples A, B, C, D, and E will be used herein todefine five such calibration samples having a conductive top-layerfabricated with a calibration metal measuring 50,000, 100,000, 150,000,170,000, and 200,000 Å, respectively. The various calibration metalsthat may be used include, for example, Ti 6-4, Al, Ni, Ni-alloy,stainless steel (300 Series), and combinations thereof. Although each ofa plurality of lo calibration samples may each include conductive toplayers of varying thicknesses, this is not essential or critical and oneor more calibration samples having a range of top layer thicknesses maybe used, if desired.

[0042] As will be described in detail herein, calibration measurementsobtained from calibration samples may be correlated to eddy currentmeasurements obtained from a substrate having a conductive top layer ofunknown thickness. In some implementations, the invention may beconfigured to obtain measurements from substrates having conductive toplayers comprising conductive films typically used in the formation ofmulti-level interconnect structures including Cu, Cr, W, Al, Ta, TiN,and combinations thereof.

[0043] Usually, the conductive top layers of the calibration andsubstrate sample comprise different types of conductive materials, butthis is not required. One reason for implementing different conductivematerials in these samples is the aforementioned difficulty in measuringmetal layers less than 10,000 Å, for example. As such, many embodimentsutilize calibration samples having top layers of a lower conductivitythan that present in a top layer of a substrate sample.

[0044] By way of example only, reference will be made to calibrationsamples comprising a top layer formed from a relatively lower conductivematerial of annealed Ti 6-4, and substrate samples comprising a toplayer formed from the relatively higher conductive material, annealedcopper. Based upon the well established International Annealed CopperStandard (IACS), the conductivity of annealed copper is the standard bywhich all other electrical conductors are compared. According to thisstandard, the conductivity of annealed copper measures 100 IACS, whilethe lower conductive material of annealed Ti 6-4 is measured as afractional percentage ({fraction (1/100)}) of annealed copper.

[0045] Utilizing this known relationship, the conductivity of aparticular thickness of annealed copper is equal to a layer of Ti 6-4that is 100 times thicker than the annealed copper. One example of thisprincipal is illustrated by noting that the conductivity of a 1,000 Ålayer of annealed copper is equal to the conductivity of a 100,000 Ålayer of Ti 6-4, as shown in the following equation:

100*1,000 Å=100,000 Å.  Eq. 1

[0046] In accordance with some embodiments, measurement of calibrationsamples having top layers of known thicknesses of Ti 6-4 may be used indetermining the thickness of a copper top layer of a semiconductor waferproduct utilizing the above-described conductive relationship betweenthese materials. And as will be described in detail herein, thecalibration of an eddy current measuring probe for measuring micro-thincopper layers, for example, can be accomplished using a proportionatelythicker layer of material such as Ti 6-4. It is also to be understoodthat the proportional conductive relationship described with respect toTi 6-4 and annealed copper apply to situations involving any of theaforementioned conductive materials that may be used to form thecalibration or substrate samples.

[0047] To illustrate the conductive relationship between conductive toplayers of calibration and substrate samples of the invention, thefollowing is presented.

ρ=172.41/σ  Eq. 2

[0048] Where p denotes resistivity and σ defines conductivity in IACSunits.

ρ=Thickness X Sheet resistance=t X R(s)  Eq. 3

[0049] Where t denotes thickness and R(s) defines sheet resistance, thusproviding the following equation:

R(s)=ρ/t  Eq. 4

[0050] From this relationship, the following equations may be provided:

R(s) copper=ρ copper/t copper  Eq. 5

R(s) Ti-6-4/t Ti 6-4  Eq. 6

[0051] Assume now a calibration sample having a Ti 6-4 top layer thatmeasures 100,000 Å, and a measuring sample having a copper top layerthat is 1,000 Å. Substituting these values into the appropriateabove-two equations provides the following.

[0052] With regard to the copper top layer of the substrate sample:$\begin{matrix}\begin{matrix}{{{R(s)}{copper}} = \frac{\left( \frac{171.41}{\sigma} \right)}{\text{1,000}Å}} \\{= \frac{\left( \frac{171.41}{100\quad {IACS}} \right)}{\text{1,000}Å}} \\{= \frac{171.41}{\text{100,000}{{Å({IACS})}.}}}\end{matrix} & \text{Eq. 7}\end{matrix}$

[0053] With regard to the Ti 6-4 top layer of the calibration sample:$\begin{matrix}\begin{matrix}{{{{R(s)}T\quad i\quad 6} - 4} = \frac{\left( \frac{171.41}{1\quad {IACS}} \right)}{\text{100,000}Å}} \\{= \frac{171.41}{\text{100,000}{{Å({IACS})}.}}}\end{matrix} & \text{Eq. 8}\end{matrix}$

[0054] Accordingly, it is demonstrated that:

R(s) copper=R(s) Ti 6-4  Eq. 9

[0055] when the Ti 6-4 layer measures 100,00 Å, and the copper layermeasures 1,000 Å.

[0056] Knowledge of electrical behavior, in terms of equivalent sheetresistance, of materials comprising the calibration and substratesamples permit the use of calibration samples having metal layers (Ti6-4) that are 100 times thicker than copper layers formed on substratesamples.

[0057] By way of specific example, calibration samples may includeconductive top layers formed from Ti 6-4 having a range of thicknessessuch as 10,000, 20,000, 30,000, 40,000, 50,000, 60,000, 70,000, 80,000,90,000, or 100,000 Å. Using the previously described conductivityrelationship between Ti 6-4 and annealed copper, each of thejust-described Ti 6-4 layer thicknesses may be used to represent aspecific eddy current response of a substrate sample comprising a toplayer formed with annealed copper having a thickness of, respectively,100, 200, 300, 400, 500, 600, 700, 800, 900, and 1,000 Å. Accordingly,the measurement of a substrate sample having a micro-thin copper toplayer of unknown thickness disposed upon its surface can be accomplishedusing calibration samples having a correspondingly thicker top layer ofTi 6-4 (100 times thicker).

[0058] Selection of specific frequency, gain, and voltage drive levelsmay be used to obtain a maximum magnitude eddy current signal response,while retaining an ability to determine phase separation at differentthicknesses (for example, 500 Å and 1,000 Å). For a given conductivematerial, such as copper, a calibration sample comprising acorresponding thicker layer of Ti 6-4 may be utilized (as describedabove).

[0059] In operation, AC voltage 28 may introduce pre-selected sinusoidalwaves at a suitable frequency to Wheatstone bridge 30. In someimplementations, adjustable electronic bridge circuit 32 may be appliedto the Wheatstone bridge to balance the circuit and zero the referencevoltage. At this point, controller 20 may translate eddy current sensecoil 14 until the coil approaches contact with the surface of substrate22, as indicated by distance 42, at which point the Wheatstone bridgeunbalances its voltage between legs. This voltage may be measured,detecting the amplitude of the in-phase component (X) as well as thequadrature component (Y). As used herein, X voltage values representresistance, while the Y voltage values represent reactance.

[0060]FIG. 2 is a graph showing two-point lift-off curves relating toeddy current measurements taken from calibration and substrate samplehaving, respectively, known and unknown thicknesses. This graph will bedescribed with reference to the eddy current measuring system shown inFIG. 1.

[0061] As previously described, many embodiments utilize the knownconductive relationship between conductive materials forming the toplayers of the calibration and substrate samples. Based upon this knownconductive relationship, curves representing eddy current measurementsobtained from calibration samples comprising top layers formed fromvariably thick layers of Ti 6-4 may be correlated to substrate samplescomprising top layers formed from relatively thinner layers of annealedcopper.

[0062] For example, eddy current measurements obtained from calibrationsample A (comprising a 50,000 Å top layer of Ti 6-4) may besubstantially identical to eddy current measurements obtained from asubstrate comprising a 500 Å top layer of annealed copper. Thisrelationship holds true for each of the remaining curves B through E.For instance, eddy current measurements obtained from calibrationsamples B, C, D, and E (respectively comprising 100,000 Å, 150,000 Å,170,000 Å, and 200,000 Å top layers of Ti 6-4) are respectivelyidentical to eddy current measurements obtained from samples comprisingtop layers of annealed copper measuring 500 Å, 1,000 Å, 1,500 Å, 1,700Å, and 2,000 Å.

[0063] Accordingly, curves representing eddy current measurementsobtained from calibration samples comprising Ti 6-4 top layers ofvariable thickness are identical to curves representing eddy currentmeasurements obtained from samples comprising top layers formed fromannealed copper that are of a thickness that is {fraction (1/100)} ofthat of the Ti 6-4 layers.

[0064] Referring still to FIG. 2, curves A through E each includeinitial data values (X,Y) that are illustrated on the left side of thisgraph, and which eventually terminate near the bottom right of thisgraph (0,0). In general, the system may obtain two distinct sets ofresistance and reactance values, referred to herein as initial andterminating resistance and reactance measurements. The initialresistance and reactance measurements are typically obtained when theeddy current sense coil is positioned an initial distance 42 relative tothe substrate surface.

[0065] Terminating resistance and reactance measurements, on the otherhand, may be obtained after increasing (or decreasing) the relativedistance between the eddy current sense coil and the substrate surface.This increase or decrease in distance will be referred to herein as anincremental distance. Initial distance 42 may be any distance thatpermits the detection of sufficiently strong eddy current signals, whilethe incremental distance may be any distance that allows the detectionof initial and terminating measurements representing two discretevalues. In some instances, this may be accomplished by implementing anincremental distance of a few microns, and in other cases, anincremental distance of 20-40 microns, or more, may be required.

[0066] A particular example may be where the initial distance is about75 microns, and the incremental distance is about 15-20 microns.Accordingly, in this situation, the terminating resistance and reactancemeasurements may be obtained when the relative distance between the eddycurrent sense coil and the substrate surface is about 90-95 microns.

[0067] A possible variation on this aspect may be where terminatingresistance and reactance measurements are obtained after decreasing therelative distance between the eddy current sense coil and the surface ofthe substrate. In this particular implementation, it is typicallynecessary that initial distance 42 is such that the eddy current probedoes not contact the substrate measurements when making the terminatingmeasurements.

[0068] A specific example of obtaining eddy current measurements from anassortment of calibration samples comprising variably thick top layersof conductive materials will now be described. Referring still to FIG.2, curve A denotes eddy current measurements that may be obtained fromcalibration sample A comprising a 50,000 Å top layer of Ti 6-4. Curve Ais shown having initial resistance and reactance values (X,Y) of about−0.7 volts and 0.07 volts, respectively. These initial resistance andreactance values may be obtained while eddy current sense coil 14 ispositioned at a particular or desired initial distance 42 relative tothe surface of the calibration sample.

[0069] Curve A further includes a series of additional eddy currentmeasurements that ultimately terminate in resistance and reactancevalues (X,Y) near 0,0; thus indicating a measurement of near zeroresistance and reactance voltages. These terminating resistance andreactance voltage values (X,Y) define eddy current measurements obtainedwhen sense coil 14 and the surface of calibration sample A are separatedby such a distance that no eddy current signal is detected. Theseterminating values will also be referred to herein as “eddy current onair.” It is to be understood that terminating values are often obtainedusing eddy current on air values since these types of signals are easilyidentified. However, the invention is not so limited and any incrementaldistance may be used as long as it permits the measuring of initial andterminating values having two discrete values.

[0070] Eddy current on air values may be obtained by increasing therelative distance between sense coil 14 and the surface of thecalibration sample until no eddy current signal is detected. Increasingthe relative distance between these elements may be accomplished byretracting eddy current probe 12 and included components (sense andreference coils 4 and 6; capacitance sensor 18) from the calibrationsample. Additionally or alternatively, the calibration sample may betranslated relative to the eddy current probe.

[0071] Curves B through E may be generated in a similar manner. Forinstance, curves B, C, D, and E illustrate eddy current measurementsthat may be obtained from calibration samples comprising top layersformed from Ti 6-4 of variable thickness (100,000 Å, 150,000 Å, 170,000Å, and 200,000 Å), and are respectively identical to measurements thatmay be obtained from a substrate sample comprising top layers ofannealed copper measuring 1,000 Å, 1,500 Å, 1,700 Å, and 2,000 Å.

[0072] Initial resistance and reactance values (X,Y) for each curve Bthrough E may also be obtained by positioning eddy current sense coil 14at initial distance 42. Curves B through E also include a series ofadditional measurements that ultimately terminate in resistance andreactance values (X,Y) near 0,0. Curve U is associated with anon-calibration sample, and will be described in more detail inconjunction with later figures.

[0073] A calibration operation has been described using five distinctcalibration samples having conductive top layers of variable thickness.Although no particular number calibration samples are required oressential, it is typically necessary to have at least two calibrationsamples of different thicknesses to provide a basis for thicknessestimation. Alternatively, one or more calibration samples providing arange of top layer thicknesses may also be used. Regardless of thecalibration sample configuration, each of the initial resistance andreactance values (X,Y) for each of the curves A through E may be used asthe basis for the generation of a natural intercepting curve, as willnow be described.

[0074] Natural Intercepting Curve

[0075]FIG. 3 is a graph showing one method for forming a naturalintercepting curve based upon initial resistance and reactance values(X,Y) of curves A through E.

[0076] The natural intercepting curve may be generated using knowncurve-fitting methods, and may be represented in general form by thefollowing equation:

Y=m e ^(−nX).  Eq. 10

[0077] The m and n coefficients may be calculated by substituting theinitial resistance and reactance values (X, Y) for a particular curveinto this equation.

[0078] In another calculation, a linear equation may be generated for aparticular curve based upon two data points; namely, the initialresistance and reactance values (X,Y) and the terminating resistance andreactance values (X,Y). For example, a first data point may be obtainedwhile eddy current sense coil 14 is positioned at initial distance 42relative to the surface of the calibration sample; and a second datapoint may be obtained by increasing (or decreasing) the relativedistance between these two objects.

[0079] The first and second data points may then be used to generate alinear equation such as the following:

Y=aX+b.  Eq. 11

[0080] Where ‘a’ defines slope and ‘b’ denotes the offset value presentduring data collection resulting from thermal drift or from measuringdifferences that may occur when different eddy current probes are usedfor measuring the calibration and inspection samples. The collection ofthese two data points is typically less than 1 second, and in comecases, data collection requires less than 0.3 seconds per data point.Coefficients ‘a’ and ‘b’ can be calculated by substituting the value ofthe (X,Y) voltage pair into the equation.

[0081] To eliminate the effects of thermal drift and eddy current probemeasuring differences, the ‘b’ coefficient may be eliminated, resultingin the following equation:

Y=aX  Eq. 12

[0082] which will be referred to herein an “intersecting line.”Eliminating the ‘b’ coefficient helps assure that the intersecting lineis brought back to the original coordinates of the impedance plane(0,0). Intersecting line equations may be generated for each of thecalibration samples A through E, resulting in calibration sampleintersecting lines A, B, C, D, and E, respectively.

[0083] Intersection Point

[0084] In another calculation, the intersection point of a calibrationsample intersecting line and the natural intercepting curve may bedetermined. This calculation is performed for each of the calibrationsamples A through E, resulting in calibration sample intersection pointsA, B, C, D, and E, respectively.

[0085] The calculation of these intersection points may be accomplishedby equating the natural intercepting curve and one of theabove-generated calibration sample intersecting line equations, asillustrated in the following equation:

m e ^(−nX) =aX.  Eq. 13

[0086] A calculated intersection point may have coordinates (X,Y). The Ycoordinate in the generated intersection point denotes reactance (volts)and will be used as a Y coordinate in forming the digital calibrationthickness curve, as will now be described.

[0087] Digital Calibration Curve

[0088]FIG. 4 is a graph showing a digital calibration curve generated bydata associated with calibration samples A through E. In this graph, theX coordinate denotes the thickness of the various calibration samples(500 Å-2,000 Å) which again have been obtained from the correspondinglythicker layers of Ti 6-4, while the Y coordinate denotes reactance(volts) of the previously generated calibration sample intersectionpoint.

[0089] For example, point A represents the top layer thickness andassociated reactance value for calibration sample A. Specifically, pointA represents a calibration sample A having a copper top layer of about500 Å and a reactance value of about 0.07 volts. Similarly, calibrationsamples B, C, D, and E represent calibration samples having,respectively, copper top layers measuring about 1,000 Å, 1,500 Å, 1,700Å, and 2,000 Å; and associated reactance values of about 0.152, 0.21,0.23, and 0.27 volts.

[0090] In many embodiments, a digital calibration curve provides thebasis for determining the thickness of conductive top layers formed on agiven substrate such as a semiconductor wafer product. Whileconventional systems require continuous or periodic recalibration tocorrect thermal drift, for example, the present invention typically doesnot require any such recalibration. Typically, once the digitalcalibration curve has been formed, no further calibration processes arenecessary.

[0091] Measure Thickness of Conductive Top Layer

[0092]FIG. 5 is a flowchart showing one of a variety of differentmethods for estimating the thickness of a conductive top layer of asubstrate sample, and will be described with reference to the eddycurrent measuring system shown in FIG. 1, as well as the graphs shown inFIGS. 2-4. It is to be understood that at some point prior to thicknessestimation, a digital calibration curve (FIG. 4) has been previouslygenerated by obtaining measurements from one or more calibration samples(described above).

[0093] As indicated in block 50, eddy current sense coil 14 may beinitially positioned at initial distance 42 relative to the surface ofsubstrate sample U. At this point, initial resistance and reactancevalues (X,Y) of the substrate sample U may be obtained.

[0094] Next, the relative distance between the sense coil and thesubstrate sample U may be increased (or decreased) an incrementaldistance so that terminating resistance and reactance voltage values(X,Y) may be obtained (Block 55). Curve U in FIG. 3 provides an exampleof initial and terminating resistance and reactance values (X,Y) for thesubstrate sample U.

[0095] In block 60, the initial and terminating resistance and reactancevalues (X,Y) of the substrate sample U may be used in the followingequation:

Y=aX+b.  Eq. 14

[0096] In many instances, the ‘b’ coefficient may be eliminated tocorrect for thermal drift and eddy current probe measuring differences,resulting in the following equation:

Y=aX.  Eq. 15

[0097] This equation is referred to herein as intersecting line U.

[0098] As shown in block 65, the intersection point between the naturalintercepting curve and the wafer substrate intersecting line U may bedetermined by the following equation:

m e ^(−nX) =aX.  Eq. 16

[0099] The generated intersection point may have a coordinate of (X,Y).Significantly, the Y value in the generated intersection pointcoordinates denotes reactance (volts) of the intersection point. Inblock 70, this Y value is located along the Y axis of the previouslygenerated digital calibration curve (FIG. 4) so that the closest-twocalibration samples of known thickness may be determined or ascertained.

[0100] For example, the Y coordinate associated with the substratesample U will typically fall within the Y coordinates of two distinctcalibration samples. As shown in FIG. 4, the Y coordinate of thegenerated substrate sample intersection point falls between twocalibration samples (A and B), thus indicating that the top layerthickness of the substrate sample U measures between 500 Å and 1,000 Å.

[0101] As indicated in block 75, the top layer thickness of thesubstrate sample U may be more precisely determined by performing linearor non-linear calculations. For example, an appropriate linearcalculation may be accomplished by performing an interpolation betweenthe appropriate two calibration samples (for example, calibrationsamples A and B). On the other hand, a non-linear calculation may beimplemented by curve-fitting the Y coordinate associated with thesubstrate sample U to the curve defined by the appropriate twocalibrations samples.

[0102]FIG. 6 is a diagram showing an eddy current measuring systemaccording to an alternative embodiment of the present invention. In thisfigure, AC voltage source 28 is in electrical communication with sensecoil 14, reference coil 16, as well as capacitance probe 18. In thisembodiment, reactance and resistance may be detected by reactancedetector 80 and resistance detector 82, respectively. A detected signalmay be amplified utilizing an automatic gain control circuit, denoted byreference numbers 84, 86, 88, 90, and 92. Vector rotation 94 may beutilized to rotate the signal so that an appropriate graphicalpresentation may be presented at optional display 40. CPU 36 and memory38 may operate in the same manner as the eddy current measuring systemshown in FIG. 1.

[0103]FIG. 7 is a side view showing several components of an eddycurrent measuring system in accordance with the invention. In thisparticular embodiment, controller 20 is coupled with eddy current probesupport 150 containing a linear array of individual eddy current probes12. FIG. 8 provides a bottom view of the eddy current support andassociated array of individual eddy current probes.

[0104] In operation, substrate 22 may be securely positioned using asuitable wafer securing device such as a conventional wafer chuck 155.Typically, the chuck includes a vacuum or other suitable securing devicefor stabilizing the substrate during the thickness measuring process.

[0105] Implementing an array of multiple eddy current probes isparticularly useful for simultaneous inspection or monitoring ofthicknesses of multiple locations of the substrate. Although sevenseparate eddy current probes are shown, additional or fewer probes maybe implemented as may be desired or required. For example, it iscontemplated that the number of eddy current probes may range anywherefrom a single probe, to as many as 25-30 probes, or more. Othervariations may be to stagger or offset an array of multiple probes alongthe bottom side of probe support 150 in non-linear fashion. In addition,the use of multiple probe supports containing one or more eddy currentprobes may also be used. Examples of various multiple probe supportembodiments that may be implemented include arranging the probe supportsin parallel fashion, or at some angular orientation relative to oneanother.

[0106]FIG. 9 is a top view of eddy current probe support 12 positionedover substrate 22. Thickness measurements of the substrate sample may beaccomplished by providing relative motion between the substrate and eddycurrent probes 12 so that initial and terminating measurements may beobtained. One particular example may be where the probe support andassociated array of eddy current probes is rotated in direction 157.

[0107] Another example may be where the substrate is rotated relative tothe eddy current probes. This may be accomplished by removing thesubstrate from its position on chuck 155, rotating the substrate adesired number of degrees, and repositioning the substrate on the chuck.Alternatively, the chuck may be configured with a suitable controldevice for rotating the substrate sample. Yet another variation may bewhere the eddy current probe support and the substrate sample arerotated relative to each other.

[0108] Linear measuring methods may also be implemented to supplement,or as alternative, to the just-described rotational measuring options.For instance, thickness measurements of a substrate may be accomplishedby linearly translating the substrate, probe support, or both, in the Xor Y direction.

[0109]FIG. 10 is a three-dimensional contour map representing athickness profile that may be obtained from a substrate sample inaccordance with the invention. In this figure, substrate sample 22includes various elevations that may be associated with a particularthickness. Data necessary for generating the contour map may be obtainedby scanning the substrate sample with one or more eddy current probes,and making the appropriate thickness measurement at discrete locationson the substrate sample using any of the methods described herein. Forexample, the substrate sample may be scanned in radial fashion startingat or near the center and progressing in an outward manner, or viceversa. Alternatively, an eddy current probe (or probes) may be rasterscanned over the desired locations of the substrate.

[0110] Other possibilities include the use of multiple eddy currentprobes configured on an eddy current probe support 150, as depicted inFIGS. 7-9. Scanning the substrate sample to obtain a number of thicknessmeasurements may be implemented using a rotational scanning method, alinear scanning method, or both.

[0111] Initially, regardless of the type of scanning method employed,the probe support containing a multiple array of eddy current probes maybe positioned over a starting location of the substrate so thatthickness measurements of these particular locations may be obtained.

[0112] In another operation, if a rotational method is utilized, theeddy current probe support, the substrate, or both, may be rotated apre-determined number of degrees relative to one another. Upon doing so,the newly positioned eddy current probes may obtain thicknessmeasurements of different locations of the substrate. These proceduresmay be repeated until all of the required thickness measurements havebeen made.

[0113] A particular example of a rotational scanning method may be wherethe probe support is rotated 10° relative to an underlying substratesample. Upon the performance of this rotation operation, the array ofeddy current probes can obtain measurements from different locations ofthe substrate. If this rotation operation is repeated seventeen times(10° increments) the eddy current probes will have been rotated a totalof 170°, thus providing a complete scan of the substrate.

[0114] Of course, the incremental degree of rotation may be varied toaccommodate a particular measuring requirement. For instance, a total of179 rotations and corresponding measurements where a rotationalincrement of 1° is used may provide for an extremely accurate thicknessprofile of the substrate sample. On the other hand, where such a degreeof accuracy is not essential, a single rotation of 90° and correspondingmeasurement may provide sufficient thickness data.

[0115] Using a linear translation method, the eddy current probe supportand associated probes may be translated along the X and/or Y axesrelative to the substrate. Upon doing so, the newly positioned eddycurrent probes may obtain thickness measurements of different locationsof the sample. These procedures may be repeated until all of therequired thickness measurements have been obtained.

[0116]FIG. 11 is a graph representing a possible thickness profile thatmay be created by obtaining a plurality of thickness measurements over adiameter (or other portion) of a substrate sample in accordance with theinvention. In this graph, the bottom axis represents the diameter ofsubstrate 22, while the radial center of the substrate is provided indashed lines. The vertical axis denotes some of the possible top layerthickness of a substrate sample. Measurement data depicted in FIG. 11may be obtained using any of the thickness measurement techniquesdescribed herein.

[0117] The left side of the graph indicates that the leftmost edge of asubstrate sample has a thickness of about 750 Å. The thickness of thesample continues to rise to about 1,500 Å, where it then declines toabout 1,250 Å at about the radial center of the sample. The thickness ofthe substrate again rises and then falls to about 1,000 Å near the rightside of the substrate.

[0118] Knowledge of the top layer thickness of a substrate, which may beobtained using any of the various methods described herein, is useful ina range of applications. By way of example, an assortment of the manypossible implementations of an eddy current measuring system will now bedescribed.

[0119] In general, the illustrated embodiments may be characterized asan integrated or standalone eddy current measurement system (ECMS). Anintegrated ECMS may include a system that is integrated or tightlycoupled with metal deposition, or metal layer removal systems present inconventional semiconductor wafer fabrication environments. Examples ofthe possible metal deposition systems and processes that may implementan ECMS include ECP, CVD, PVD, PECVD, LPCVD, RTCVD, APCVD systems, amongothers. A chemical mechanical polishing (CMP) system is one example of ametal layer removal system that may implement an integrated ECMS.

[0120] An example of an integrated ECMS may be where the ECMS isphysically separated from an associated ECP system, for example, butwere the ECMS communicates or provides thickness data to the ECP and/ora CMP system using some type of communication link (for example, UTP,network cabling, coaxial cables, serial or parallel cables, fiberoptics, wireless link, among others). Another example, of an integratedsystem may be where the ECMS is physically separated from the ECPsystem, but the ECP system presents substrates to the ECMS using sometype of mechanical device such as a robot or conveyor. Physicallyconfiguring some or all of an ECMS system with an ECP system may alsoconstitute an integrated system.

[0121] A standalone ECMS system may be characterized as an ECMS that isnot coupled in some manner to a particular metal deposition or metallayer removal system. In essence, a standalone system is a system thatdoes not meet the requirements of an integrated system. In someimplementations, as will be described in detail herein, a standalonesystem may operate as a functional tool within a complete semiconductorfabrication environment. In other embodiments, a standalone system maybe employed to obtain thickness measurement data so that one or morediscrete components of a semiconductor fabrication system may bemonitored or controlled. Other applications include implementing thestandalone ECMS as a table-top device, which has particular appeal tothose working in research and development environments.

[0122] It is to be understood that the various ECMS systems depicted inthe following figures may be may be fabricated using any of the eddycurrent measuring systems and methods disclosed herein. Furthermore, thevarious metal deposition and metal layer removal systems depicted inFIGS. 12-15 may be implemented using conventional semiconductorfabrication system components, but with modified tooling to accommodateand utilize an associated ECMS system.

[0123] For example, the various metal deposition systems, CVD 210, PVD255, and ECP 260, may be implemented using any suitable system providingdeposition of thin metallic films using standard and well knowndeposition processes. In general, a metal deposition process involvesdepositing a filler layer over a non-planar surface of a wafer, which isone particular example of a substrate sample. For example, a conductivefiller layer may be deposited on a patterned insulated layer to fill thetrenches or holes in the insulated layer.

[0124] Similarly, CMP 220 may be implemented using any suitable systemproviding metal layer removal, a specific example of which is achemical-mechanical polishing (CMP) system. A wafer typically undergoesprocessing by a CMP system after a metal deposition process. The CMPsystem typically polishes the conductive layer until the raised patternof the insulated layer is exposed. After planarization, the portions ofthe conductive layer remaining between the raised pattern of theinsulated layer form vias, plugs and lines that provide conductive pathsbetween thin film circuits on the substrate.

[0125] The CMP process typically requires the mounting of the wafer on acarrier or polishing head. The exposed surface of the wafer may beplaced against a rotating polishing disk pad or belt pad. The polishingpad can be either a “standard” pad or a fixed-abrasive pad. A standardpad has a durable roughened surface, whereas a fixed-abrasive pad hasabrasive particles held in a containment media. The carrier headtypically provides a controllable load on the substrate to push itagainst the polishing pad. Polishing slurry, including at least onechemically-reactive agent, and abrasive particles if a standard pad isused, is supplied to the surface of the polishing pad.

[0126] One problem in CMP is determining whether the polishing processis complete; that is, whether the top layer of the wafer has beenplanarized to a desired flatness or thickness, or when a desired amountof material has been removed. Overpolishing (removing too much) of aconductive top layer or film may lead to increased circuit resistance.On the other hand, under-polishing (removing too little) of a conductivetop layer may lead to electrical shorting. Variations in the initialthickness of the top layer of a wafer may cause variations in thematerial removal rate. Accordingly, knowledge of top layer thickness ofa wafer is particularly useful in the many systems involved in thesemiconductor fabrication process.

[0127]FIG. 12 is a block diagram showing an example of an integratedECMS configured with CVD and CMP systems. In this figure, an ECMS 205 isintegrated with CVD system 210, while ECMS 215 is configured with CMPsystem 220. In this arrangement, each ECMS system may communicate orprovide thickness data in two distinct manners referred to herein asfeed forward and feed back operations.

[0128] The CVD and CMP systems depicted in this figure represent aconventionally configured semiconductor fabrication setup, as modifiedto accommodate and utilize an associated ECMS system. A typicalsemiconductor fabrication process utilizing an ECMS system may proceedas follows.

[0129] First, the CVD system may process a batch of wafers resulting inthe deposition of a top layer comprising, in many instances, copper orother conductive material. One or more of the processed batch of wafersmay be presented to ECMS 205 for thickness measurements. Next, ECMS 205may perform the required thickness measurements of the selected wafer orwafers, which typically takes a few seconds per wafer, and then providesthe generated thickness data to the CVD system using a feed backoperation. In this configuration, ECMS 205 provides near real-timeprocess control or monitoring of the CVD metal deposition process. TheCVD system may use this thickness data so that it can adjust its processparameters for processing subsequent batches of wafers. Typical processparameters for a CVD system include process time, current or voltagevalues, solution density, and the like.

[0130] As an alternative, or in addition to providing the feed backoperation, ECMS 205 may also provide thickness data to CMP system 220 ina feed forward operation. The CMP system may use the thickness data sothat it can optimize the metal removal process of the processed batch ofwafers. For example, after a batch of wafers have been processed by theCVD system, they may be transported (human operator, robotics, etc.) tothe CMP system so that a portion of the just-deposited top layer may beremoved using, for example, a CMP planarization process.

[0131] Notably, any of the ECMS systems provided herein can providethickness measurements of patterned and un-patterned wafers and istherefore not reliant upon the use of non-yielding measuring blanks.Implementing an ECMS system may therefore permit an increase in overallwafer yields since the measuring blanks may be replaced with useablepatterned wafers. Measurement accuracy is another benefit that may beprovided by an ECMS system since the actual patterned wafers, notmeasuring blanks, undergo thickness measurements.

[0132] Typically, one or several of the many wafers of a processed batchof wafers are actually measured by the ECMS systems during thefabrication process. However, every wafer of a process batch may each beindividually measured, if desired.

[0133] Similar to the CVD system, the CMP system may also use thethickness data to adjust its process parameters to provide optimalprocessing. CMP process parameters may include the relative positioningof a polishing pad on the wafer, pad velocity, pad pressure, polishingtime, slurry recipe, and the like.

[0134] If desired, the CMP system may present one or more of theplanarized batch of wafers to ECMS 215 so that post-CMP thicknessmeasurements may be obtained. In this scenario, ECMS 215 may perform therequired thickness measurements of the selected wafer or wafers and thenprovide the generated thickness data to the CMP system in a feed backoperation. In this configuration, ECMS 215 provides near real-timeprocess control or monitoring of the CMP process. Alternatively oradditionally, ECMS 215 may also communicate or provide the generatedpost-CMP thickness measurement data to the CVD system in a feed forwardoperation.

[0135] Any of the ECMS systems described herein may perform thicknessmeasurements on processed wafers on a periodic or continuous basis asmay be required or desired in a particular application. For example, insome instances, one or more wafers of every batch of wafers may bemeasured by the ECMS system. In other situations, it may be optimal tomeasure processed wafers on a predetermined or random basis (forexample, every hour, once a day, once a week, etc.)

[0136] Suitable systems for implementing CVD 210 include, for example,the Endura Electra Cu CVD system marketed by Applied Materials, Inc., ofSanta Clara, Calif., and the Altus line of CVD systems developed byNovellus Systems, Inc., of San Jose, Calif. An example of a suitable CMPsystem 220 includes the Reflexion CMP system of Applied Materials, andMomentum 200 or 300 CMP systems marketed by Novellus Systems.

[0137]FIG. 13 is a block diagram showing multiple metal depositionsystems configured with integrated ECMS systems. In this figure, ECMSsystems 255, 260, and 205 are shown respectively integrated with PVDsystem 265, ECP system 270, and CVD system 210, while ECMS 215 isconfigured with CMP system 220. In this arrangement, thickness data ofprocessed wafers may be obtained from any of a variety of differentmetal deposition systems. This particular embodiment may be implementedto provide system control or monitoring during semiconductor fabricationwhere different deposition processes (for example, PVD, ECP, CVD, etc.)are utilized during particular stages of fabrication.

[0138] Similar to other embodiments, each of the metal deposition andremoval systems depicted in this figure represent a conventionallyconfigured semiconductor fabrication setup, as modified to accommodateand utilize an associated ECMS system. A typical semiconductorfabrication process utilizing an ECMS system within a multiple metaldeposition system environment may proceed as follows.

[0139] First, the PVD system may process a batch of wafers according towell known PVD processing methods, resulting in the deposition ofconductive material on a wafer substrate. The PVD system may thenpresent one or more of the processed batch of wafers to ECMS 255 forthickness measurements. After making the required thicknessmeasurements, ECMS 255 may communicate the generated thickness data tothe PVD system in a feed back operation, and to CMP 220 system in a feedforward operation.

[0140] As before, the CMP system may also use the thickness data toadjust its process parameters to provide optimal processing of the batchof wafers. After processing, the CMP system may present one or more ofthe planarized batch of wafers to ECMS 215 so that post-CMP thicknessmeasurement may be obtained. After performing the required thicknessmeasurements, ECMS 215 may communicate the generated thickness data tothe CMP system in a feed back operation. Alternatively or additionally,ECMS 215 may also communicate or provide the generated post-CMPthickness measurement data to some or all of the metal depositionsystems in a feed back operation.

[0141] At some point, wafer processing may proceed by subjecting thebatch of wafers to lo additional deposition processes using, forexample, any of the deposition systems depicted in FIG. 13. In somecases the wafers may undergo repeated layering cycles using the samemetal deposition process (for example, repeated PVD metal depositioncycles). In other situations, the wafers may be further processed usingalternating or varying metal deposition cycles (for example,PVD→CVD→CVD→ECP→PVD→CVD, etc.). Regardless of the particular depositionprocesses utilized (repeated or varying), an integrated ECMS systemconfigured with a particular deposition system may perform the requiredthickness measurements and provide the generated thickness data usingthe appropriate feed back and feed forward operations previouslydiscussed.

[0142] The PVD and ECP systems may use the calculated thickness data sothat they can adjust their respective process parameters for processingsubsequent batches of wafers. Typical process parameters for the PVD andECP systems include one or more parameters such as process time, currentor voltage values, solution density, ion source, chamber temperature,and the like.

[0143] Examples of a suitable PVD system 265 include the INOVA line ofPVD systems marketed by Novellus Systems. The Electra Cu systemdeveloped by Applied Materials is one example of an ECP system that maybe used for implementing ECP system 270.

[0144]FIG. 14 is a block diagram showing an example of an integratedECMS configured with a single metal deposition system. In this figure, afully functional ECMS system 205 is shown integrated with CVD system210. This arrangement is often implemented whenever the control ormonitoring of a discrete semiconductor fabrication processes is desired.In this specific example, ECMS system 205 is used for generatingthickness measurements of wafers processed by CVD system 210. A similararrangement may be employed for control or monitoring of any of theother metal deposition systems.

[0145] It is to be understood that each deposition system can beconfigured with a fully functional ECMS system (feed forward and feedback capabilities), or with an ECMS system that provides either a feedforward or a feed back operation. Other possibilities includeimplementing an ECMS system in a limited number of semiconductorfabrication systems. A particular example may include configuring CMPsystem 220 with a fully functional ECMS system 215, while none of theother metal deposition systems implemented have an ECMS system. Anotherexample is where all of the metal deposition systems have an ECMSsystem, but CMP system 220 does not have an ECMS system.

[0146]FIG. 15 is a block diagram showing an example of a standaloneimplementation of an ECMS. In this figure, standalone ECMS system 325 isshown in a relative spatial relationship to PVD system 255, ECP system270, CVD system 210, and CMP system 220. This implementation is similarto the configuration depicted in FIG. 13. However, a notable distinctionis that the configuration of FIG. 15 does not include the communicationof thickness data to any of the various other systems using, forexample, feed back and feed forward operations. ECMS system 325functions as standalone unit.

[0147] This particular embodiment may be implemented to provide systemmonitoring during semiconductor fabrication where different depositionprocesses (for example, PVD, ECP, CVD, etc.) are utilized during variousstages of fabrication. A particular example may be where a systemoperator may remove particular wafers from the various fabricationsystems and manually or mechanically present the wafers to ECMS 325 forthickness measurements. ECMS 325 may then perform the required thicknessmeasurements and present the generated thickness data to the systemoperator using a display screen, printer, or other suitable outputdevice. If desired, the operator may use this thickness data to verifythe performance of each of these fabrication systems.

[0148] While the invention has been described in detail with referenceto disclosed embodiments, various modifications within the scope andspirit of the invention will be apparent to those of ordinary skill inthis technological field. It is to be appreciated that featuresdescribed with respect to one embodiment typically may be applied toother embodiments. Therefore, the invention properly is to be construedwith reference to the claims.

What is claimed is:
 1. A method for thickness estimation of a conductivetop layer of a substrate sample, said method comprising: (a) receivingsaid substrate sample after said substrate sample has undergone achemical vapor deposition (CVD) process depositing said conductive toplayer of said substrate sample; (b) obtaining initial resistance andreactance measurements from said substrate sample using an eddy currentprobe positioned at an initial distance relative to said substratesample; (c) obtaining terminating resistance and reactance measurementsfrom said substrate sample using said eddy current probe positioned at amodified distance relative to said substrate sample; (d) calculating anintersecting line using said initial and terminating resistance andreactance measurements; (e) determining an intersecting point between apreviously defined natural intercepting curve and said intersectingline, wherein said natural intercepting curve is defined by a pluralityof initial resistance and reactance measurements obtained from at leastone calibration sample individually or collectively having a known rangeof top layer thicknesses; (f) locating a reactance voltage of saidintersecting point along a digital calibration curve to identify aclosest-two of said known range of top layer thicknesses, wherein saiddigital calibration curve is defined by a plurality of initial reactancemeasurements and corresponding top layer thicknesses of said at leastone calibration sample; and (g) estimating a thickness of saidconductive top layer of said substrate sample by approximating alocation of said reactance voltage relative to said closest-two of saidknown range of top layer thicknesses of said at least one calibrationsample.
 2. The method according to claim 1, said method furthercomprising: scanning a plurality of locations of said substrate sampleto generate a thickness profile, wherein said thickness profile isgenerated by performing operations (b) through (g) for each of saidplurality of locations of said substrate sample.
 3. The method accordingto claim 2, said method further comprising: providing said thicknessprofile to a chemical vapor deposition (CVD) system that is adapted toprovide said CVD process.
 4. The method according to claim 2, saidmethod further comprising: providing said thickness profile to achemical-mechanical polishing (CMP) system.
 5. The method according toclaim 2, said method further comprising: providing said thicknessprofile to a plurality of metal deposition systems that are adapted toprovide metal layer deposition on semiconductor wafer products, whereinsaid plurality of metal deposition systems are selected from the groupconsisting of an electro-chemical process (ECP) system, chemical vapordeposition (CVD) system, physical vapor deposition (PVD) system, plasmaenhanced CVD (PECVD) system, low pressure CVD (LPCVD) system, rapidthermal CVD (RTCVD) system, and an atmospheric pressure CVD (APCVD)system.
 6. The method according to claim 1, wherein said terminatingresistance and reactance measurements are obtained after increasing therelative distance between said eddy current probe and said substratesample.
 7. The method according to claim 1, wherein said terminatingresistance reactance measurements are obtained after decreasing therelative distance between said eddy current probe and said substratesample.
 8. The method according to claim 1, wherein said approximatingis accomplished by performing an interpolation between said closest-twoof said known range of top layer thicknesses of said at least onecalibration sample.
 9. The method according to claim 1, wherein saidapproximating is accomplished by curve-fitting said reactance voltage tosaid digital calibration curve.
 10. The method according to claim 1,wherein said initial and modified distances relative to said substrateare obtained using a proximity sensor selected from the group consistingof a capacitance sensor, optical laser, Hall effect sensor, thermal IRsensor, and an ultrasound sensor.
 11. The method according to claim 1,wherein said at least one calibration sample includes a top layer of adifferent conductance than said conductive top layer of said substratesample.
 12. A system for thickness estimation of a conductive top layerof a substrate sample, said system comprising: an eddy current probecomprising an eddy current sense coil; a controller providing relativemotion between said eddy current probe and said substrate sample; aprocessor for processing measurements detected by said eddy currentsense coil, wherein said processor is configured to estimate a thicknessof said conductive top layer of said substrate sample by a methodcomprising: (a) receiving said substrate sample after said substratesample has undergone a chemical vapor deposition (CVD) processdepositing said conductive top layer of said substrate sample; (b)obtaining initial resistance and reactance measurements from saidsubstrate sample using an eddy current probe positioned at an initialdistance relative to said substrate sample; (c) obtaining terminatingresistance and reactance measurements from said substrate sample usingsaid eddy current probe positioned at a modified distance relative tosaid substrate sample; (d) calculating an intersecting line using saidinitial and terminating resistance and reactance measurements; (e)determining an intersecting point between a previously defined naturalintercepting curve and said intersecting line, wherein said naturalintercepting curve is defined by a plurality of initial resistance andreactance measurements obtained from at least one calibration sampleindividually or collectively having a known range of top layerthicknesses; (f) locating a reactance voltage of said intersecting pointalong a digital calibration curve to identify a closest-two of saidknown range of top layer thicknesses, wherein said digital calibrationcurve is defined by a plurality of initial reactance measurements andcorresponding top layer thicknesses of said at least one calibrationsample; and (g) estimating a thickness of said conductive top layer ofsaid substrate sample by approximating a location of said reactancevoltage relative to said closest-two of said known range of top layerthicknesses of said at least one calibration sample.
 13. The systemaccording to claim 12, wherein a plurality of locations of saidsubstrate sample are scanned to generate a thickness profile, whereinsaid thickness profile is generated by performing operations (b) through(g) for each of said plurality of locations of said substrate sample.14. The system according to claim 13, wherein said thickness profile iscommunicated to a chemical vapor deposition (CVD) system that is adaptedto provide said CVD process.
 15. The system according to claim 13,wherein said thickness profile is communicated to a chemical-mechanicalpolishing (CMP) system.
 16. The system according to claim 13, whereinsaid thickness profile is communicated to a metal deposition system thatis adapted to provide metal layer deposition on semiconductor waferproducts.
 17. The system according to claim 13, wherein said thicknessprofile is communicated to a plurality of metal deposition systems thatare adapted to provide metal layer deposition on semiconductor waferproducts, wherein said plurality of metal deposition systems areselected from the group consisting of an electro-chemical process (ECP)system, chemical vapor deposition (CVD) system, physical vapordeposition (PVD) system, plasma enhanced CVD (PECVD) system, lowpressure CVD (LPCVD) system, rapid thermal CVD (RTCVD) system, and anatmospheric pressure CVD (APCVD) system.
 18. The system according toclaim 12, wherein said terminating resistance and reactance measurementsare obtained after increasing the relative distance between said eddycurrent probe and said substrate sample.
 19. The system according toclaim 12, wherein said terminating resistance reactance measurements areobtained after decreasing the relative distance between said eddycurrent probe and said substrate sample.
 20. The system according toclaim 12, wherein said approximating is accomplished by performing aninterpolation between said closest-two of said known range of top layerthicknesses of said at least one calibration sample.
 21. The systemaccording to claim 12, wherein said approximating is accomplished bycurve-fitting said reactance voltage to said digital calibration curve.22. The system according to claim 12, wherein said initial and modifieddistances relative to said substrate are obtained using a proximitysensor selected from the group consisting of a capacitance sensor,optical laser, Hall effect sensor, thermal IR sensor, and an ultrasoundsensor.
 23. The system according to claim 12, wherein said at least onecalibration sample includes a top layer of a different conductance thansaid conductive top layer of said substrate sample.
 24. A method forthickness estimation of a conductive top layer of a substrate sample,said method comprising: (a) receiving said substrate sample after saidsubstrate sample has undergone a chemical vapor deposition (CVD) processdepositing said conductive top layer of said substrate sample; (b) meansfor obtaining initial resistance and reactance measurements from saidsubstrate sample using an eddy current probe positioned at an initialdistance relative to said substrate sample; (c) means for obtainingterminating resistance and reactance measurements from said substratesample using said eddy current probe positioned at a modified distancerelative to said substrate sample; (d) means for calculating anintersecting line using said initial and terminating resistance andreactance measurements; (e) means for determining an intersecting pointbetween a previously defined natural intercepting curve and saidintersecting line, wherein said natural intercepting curve is defined bya plurality of initial resistance and reactance measurements obtainedfrom at least one calibration sample individually or collectively havinga known range of top layer thicknesses; (f) means for locating areactance voltage of said intersecting point along a digital calibrationcurve to identify a closest-two of said known range of top layerthicknesses, wherein said digital calibration curve is defined by aplurality of initial reactance measurements and corresponding top layerthicknesses of said at least one calibration sample; and (g) means forestimating a thickness of said conductive top layer of said substratesample by approximating a location of said reactance voltage relative tosaid closest-two of said known range of top layer thicknesses of said atleast one calibration sample.
 25. A monitoring system providing athickness profile of a conductive top layer of a substrate sample, saidsystem comprising: an eddy current probe support; a plurality of eddycurrent probes comprising separate eddy current sense coils, whereinsaid plurality of eddy current probes are configured with said eddycurrent probe support; a controller configured with said eddy currentprobe support providing relative motion between each of said pluralityof said eddy current probes and said substrate sample; a processor forprocessing measurements detected by each of said plurality of eddycurrent sense coils, wherein said processor is configured to estimate athickness profile of said conductive top layer of said substrate sampleby a method comprising: (a) receiving said substrate sample after saidsubstrate sample has undergone a chemical vapor deposition (CVD) processdepositing said conductive top layer of said substrate sample; (b)obtaining initial resistance and reactance measurements from saidsubstrate sample using one of said plurality of eddy current probespositioned at an initial distance relative to said substrate sample; (c)obtaining terminating resistance and reactance measurements from saidsubstrate sample using said one of said plurality of eddy current probespositioned at a modified distance relative to said substrate sample; (d)calculating an intersecting line using said initial and terminatingresistance and reactance measurements; (e) determining an intersectingpoint between a previously defined natural intercepting curve and saidintersecting line, wherein said natural intercepting curve is defined bya plurality of initial resistance and reactance measurements obtainedfrom at least one calibration sample individually or collectively havinga known range of top layer thicknesses; (f) locating a reactance voltageof said intersecting point along a digital calibration curve to identifya closest-two of said known range of top layer thicknesses, wherein saiddigital calibration curve is defined by a plurality of initial reactancemeasurements and corresponding top layer thicknesses of said at leastone calibration sample; (g) estimating a thickness of said conductivetop layer of said substrate sample by approximating a location of saidreactance voltage relative to said closest-two of said known range oftop layer thicknesses of said at least one calibration sample; and (h)estimating said thickness profile of said conductive top layer of saidsubstrate sample by repeating operations (b) through (g) for each ofsaid plurality of eddy current probes.
 26. The system according to claim25, wherein said chemical vapor deposition (CVD) process is provided bya CVD system that is configured with said monitoring system.
 27. Thesystem according to claim 25, wherein said controller rotates said eddycurrent probe support over said substrate to scan a plurality oflocations of said substrate, and wherein an enhanced thickness profileis generated by performing operations (b) through (h) for each of saidplurality of locations of said substrate sample.
 28. The systemaccording to claim 25, wherein said controller linearly translates saideddy current probe support over said substrate sample to scan aplurality of locations of said substrate sample, and wherein an enhancedthickness profile is generated by performing operations (b) through (h)for each of said plurality of locations of said substrate sample.